TEACHING APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME AND TEACHING METHOD

摘要

The present invention relates to a teaching device and a teaching method. The teaching device including a plurality of reflective members; a transfer robot transferring a board to be tested; and a distance measuring unit, which radiates lights to the reflective members, receives the lights reflected by the reflective members, and measures the distance between regions of the board to be tested, and the teaching method are disclosed.