发明名称
摘要 <p>PROBLEM TO BE SOLVED: To provide a processing order management system and processing order management program for giving a high priority to a lot to be rapidly processed in consideration of a next stage.SOLUTION: Calculating means 11 of a processing order management system 10 sets, as a target lot, each lot associated with a processing inspection device in an in-process lot table D4, and identifies a next stage processing inspection device of each target lot. The calculating means 11 identifies a processing start schedule time of each target lot in the next stage processing inspection device. On the basis of the processing start schedule time in the next stage processing inspection device of each target lot, the calculating means 11 changes the schedule processing order of each target lot in the in-process lot table.</p>
申请公布号 JP5341248(B1) 申请公布日期 2013.11.13
申请号 JP20120284077 申请日期 2012.12.27
申请人 发明人
分类号 G05B19/418;G06Q50/04;H01L21/02 主分类号 G05B19/418
代理机构 代理人
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