发明名称 |
Electrode comb, micromechanical component, and method for producing an electrode comb or a micromechanical component |
摘要 |
An electrode comb for a micromechanical component includes at least one electrode finger for which a first electrode finger subunit with a first central longitudinal axis and a second electrode finger subunit with a second central longitudinal axis are defined. The second central longitudinal axis are defined is inclined in relation to the first central longitudinal axis about a bend angle not equal to 0° and not equal to 180°.
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申请公布号 |
US8581470(B2) |
申请公布日期 |
2013.11.12 |
申请号 |
US20080736461 |
申请日期 |
2008.12.04 |
申请人 |
PIRK TJALF;PINTER STEFAN;MUCHOW JOERG;FRITZ JOACHIM;ROBERT BOSCH GMBH |
发明人 |
PIRK TJALF;PINTER STEFAN;MUCHOW JOERG;FRITZ JOACHIM |
分类号 |
H02N1/00 |
主分类号 |
H02N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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