发明名称 |
Low temperature CNT growth using gas-preheat method |
摘要 |
A method for synthesizing carbon nanotubes (CNT) comprises the steps of providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes; and passing a substrate through the growth chamber; and introducing a feed gas into the growth chamber pre-heated to a second temperature sufficient to dissociate at least some of the feed gas into at least free carbon radicals to thereby initiate formation of carbon nanotubes onto the substrate.
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申请公布号 |
US8580342(B2) |
申请公布日期 |
2013.11.12 |
申请号 |
US20100714390 |
申请日期 |
2010.02.26 |
申请人 |
MALECKI HARRY C.;SHAH TUSHAR K.;APPLIED NANOSTRUCTURED SOLUTIONS, LLC |
发明人 |
MALECKI HARRY C.;SHAH TUSHAR K. |
分类号 |
C23C16/00;D01C5/00;D01F9/12 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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