发明名称 HEATING DEVICE
摘要 A ceramic material mainly contains magnesium, aluminum, oxygen, and nitrogen, in which the ceramic material has a magnesium-aluminum oxynitride phase serving as a main phase, wherein XRD peaks of the magnesium-aluminum oxynitride phase measured with CuKalpha radiation appear at at least 2theta=47 to 50°.
申请公布号 KR20130123375(A) 申请公布日期 2013.11.12
申请号 KR20137007350 申请日期 2011.10.11
申请人 NGK INSULATORS, LTD. 发明人 KONDO NOBUYUKI;WATANABE MORIMICHI;JINDO ASUMI;KATSUDA YUJI;SATO YOSUKE;ISODA YOSHINORI
分类号 C04B35/581;C04B35/04;H01L21/3065;H01L21/31 主分类号 C04B35/581
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