发明名称 |
ONE BODY TYPE EVAPORATION LINEAR SOURCE AND THIN LAYERS DEPOSITION APPARATUS FOR FLAT PANEL DISPLAY HAVING THE SAME |
摘要 |
<p>An integrated evaporation source and a substrate evaporation device for a plate display device including the same are disclosed. the integrated evaporation source according to an embodiment of the present invention includes a source body forming a place where evaporation materials evaporated on the surface of a substrate are moved; a cooling block cooling the source body by being arranged to enclose the source body; and a fixing unit for blocking heat fixed to a chamber while blocking the heat of the source body on the chamber in which the substrate is evaporated.</p> |
申请公布号 |
KR20130123093(A) |
申请公布日期 |
2013.11.12 |
申请号 |
KR20120046245 |
申请日期 |
2012.05.02 |
申请人 |
SFA ENGINEERING CORP. |
发明人 |
KANG, CHANG HO;KIM, TAE HWAN;KIM, YOUNG DO |
分类号 |
C23C14/24;H01L51/50 |
主分类号 |
C23C14/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|