发明名称 ONE BODY TYPE EVAPORATION LINEAR SOURCE AND THIN LAYERS DEPOSITION APPARATUS FOR FLAT PANEL DISPLAY HAVING THE SAME
摘要 <p>An integrated evaporation source and a substrate evaporation device for a plate display device including the same are disclosed. the integrated evaporation source according to an embodiment of the present invention includes a source body forming a place where evaporation materials evaporated on the surface of a substrate are moved; a cooling block cooling the source body by being arranged to enclose the source body; and a fixing unit for blocking heat fixed to a chamber while blocking the heat of the source body on the chamber in which the substrate is evaporated.</p>
申请公布号 KR20130123093(A) 申请公布日期 2013.11.12
申请号 KR20120046245 申请日期 2012.05.02
申请人 SFA ENGINEERING CORP. 发明人 KANG, CHANG HO;KIM, TAE HWAN;KIM, YOUNG DO
分类号 C23C14/24;H01L51/50 主分类号 C23C14/24
代理机构 代理人
主权项
地址
您可能感兴趣的专利