| 摘要 |
A grinding method of grinding the back side of a workpiece having a projection on the front side thereof. The grinding method includes a holding jig preparing step of preparing a holding jig having a circular recess and an annular projection surrounding the circular recess, a setting step of setting the workpiece in the circular recess of the holding jig with the back side of the workpiece exposed, a liquid curing agent supplying step of supplying a liquid curing agent into the circular recess (either before or after the setting step), a fixing step of curing the liquid curing agent with the workpiece set in the circular recess and the liquid curing agent present in the circular recess, thereby fixing the workpiece in the circular recess, and a grinding step of grinding the back side of the workpiece and the annular projection of the holding jig by using grinding means.
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