| 摘要 |
A method and apparatus for cleaning a cavity of a vacuum insulated glass window assembly is provided in which a cleaning gas mixture of or including ozone is introduced into the cavity of the vacuum insulated glass assembly and allowed to react with residual materials, such as, for example, hydrocarbons and/or polymers. Reacted hydrocarbons and/or polymers are then removed from the vacuum cavity along with any residual cleaning gas mixture. The cleaning method is preferably performed at substantially ambient temperatures or at least temperatures below about 250° C. The ozone cleaning cycle may be repeated multiple times and followed by additional purges with other gases, such as for example nitrogen. Additional energy may be provided by heating, RF plasma; corona discharge, UV lamp, and/or the like.
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