发明名称 IRRADIATION MODULE FOR A MEASURING APPARATUS
摘要 An irradiation module for a measuring apparatus is provided. The irradiation module is light-conductive, is configured as a cohesive body and comprises a beam-splitting surface arranged within the irradiation module for splitting an incoming measuring beam into two partial beams. Furthermore, the irradiation module comprises an optical diffraction grating for interaction with a first of the two partial beams and a reflection surface for reflecting the second partial beam.
申请公布号 US2013293962(A1) 申请公布日期 2013.11.07
申请号 US201313872356 申请日期 2013.04.29
申请人 CARL-ZEISS SMS GMBH;CARL ZEISS SMS GMBH 发明人 SCHNIER DIETMAR
分类号 G03F7/20;G02B5/18 主分类号 G03F7/20
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