FINE AIR BUBBLE GENERATOR, FINE AIR BUBBLE GENERATION METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a fine air bubble generator equipped with an inexpensive device which checks whether or not the concentration of generated fine bubbles is sufficient for performing better processing in a substrate processing apparatus which processes a substrate using a process liquid including the fine bubbles generated by the fine air bubble generator and a substrate processing method.SOLUTION: A fine air bubble generator is composed of: a storage tank 2 storing a process liquid L including fine bubbles; a color sensor C detecting a color of the process liquid L; and a control part 8 detecting the concentration of the fine bubbles in the process liquid L on the basis of a detection result of the color sensor C.