发明名称 STRONTIUM PRECURSOR, METHOD FOR PREPARING SAME, AND METHOD FOR FORMING THIN FILM BY USING SAME
摘要 <p>The present invention relates to a novel strontium precursor comprising a beta-diketonate compound, wherein the strontium precursor can form a high-quality strontium thin film due to its thermal stability and high volatility.</p>
申请公布号 WO2013165212(A1) 申请公布日期 2013.11.07
申请号 WO2013KR03866 申请日期 2013.05.03
申请人 KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY 发明人 PARK, BO-KEUN;CHUNG, TAEK-MO;KIM, CHANG-GYOUN;GEORGE, SHEBY MARY;LEE, YOUNG-KUK;LIM, JONG-SUN;JEONG, SEOG-JONG;JEON, DONG-JU;AN, KI-SEOK;LEE, SUN-SOOK
分类号 C07F3/00;C23C16/18 主分类号 C07F3/00
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