Method for coating of substrates by evaporation, involves raising inner crucible vessels in stepwise or continuous manner, when evaporation surface is dropped below upper vessel edge of inner crucible vessels

摘要

The method involves making the substrate (1) to move with respect to ascending vapor cloud of vapor sources (24), so that the vapor on the substrate is formed as a layer. The vaporization spacing (22) between evaporation surface (21) and substrate is adjusted during the evaporation as a function of the amount of the evaporated material. The inner crucible vessels (12,13) among nested crucible vessels (11-13) are raised from outer crucible vessel (11) in stepwise or continuous manner, when the evaporation surface is dropped below the upper vessel edge (14) of inner crucible vessels. An independent claim is included for substrate coating device.