ACTUATOR, ROBOT HAND, ROBOT, TRANSPORTATION DEVICE, ELECTRONIC COMPONENT TRANSPORTATION DEVICE AND ELECTRONIC COMPONENT INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an actuator capable of reliably performing braking without additionally providing a brake device serving as braking means, and further to provide a robot hand that uses the actuator and enables accurate positioning control, a robot, a transportation device, an electronic component transportation device and an electronic component inspection device.SOLUTION: An actuator comprises: a piezoelectric element that vibrates by a bending vibration mode being excited or vibrates by the bending vibration mode and a longitudinal vibration mode being simultaneously excited; a driven body with which a contact part provided to the piezoelectric element is brought into contact, the driven body driven by vibration of the contact part; a holding part provided with holding means for holding the piezoelectric element; and a base provided with first biasing means for biasing the contact part of the piezoelectric element toward the driven body through the holding part. The holding part comprises a protruding part brought into contact with the driven body and second biasing means for biasing the protruding part toward the driven body.