| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck table mechanism of a machining device capable of easily attaching/detaching a sheet member having air permeability and releasability while making a center part flat, to/from a chuck table.SOLUTION: A chuck table mechanism 10 is equipped with a chuck table 11, a sheet member 12, and annular fastening portion 13. The chuck table 11 is composed of a porous material 14 which becomes a surface 10a sucking and holding a wafer WA, and a base 16 fitted with the porous material 14. The sheet member 12 has flexibility and air permeability, and is formed to be larger than the surface 10a to cover the surface 10a The annular fastening portion 13 is detachably fastened to the base 16, fixes the sheet member 12 to the chuck table 11, and is equipped with an opening 26 larger than the surface 10a. The annular fastening portion 13 is equipped with an eaves part 28 bulging out to the inside in a radial direction to surround the surface 10a, and retaining an outer peripheral edge of the sheet member 12, at the opening 26. The sheet member 12 is flatly and detachably fixed to the chunk table 11. |
