| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam irradiator for a polymer material which allows for measurement of an ion beam irradiation current without being affected by release of a large amount of gas during ion beam irradiation, and accurate measurement of irradiation amount.SOLUTION: A target vacuum chamber has an ion beam inlet, and is provided internally with a Faraday cup, irradiation sample installation means, and a partition wall for blocking gas release. The Faraday cup is disposed between the ion beam inlet and the irradiation sample installation means, and the partition wall for blocking gas release is disposed between the Faraday cup and the irradiation sample installation means. Consequently, the Faraday cup installation part and an irradiation sample are separated by the partition wall for blocking gas release, and the gas released from the irradiation sample by ion beam irradiation is prevented from arriving at the Faraday cup. |
