发明名称 |
POLYCRYSTALLINE SILICON ROD AND PROCESS FOR PRODUCTION THEREOF |
摘要 |
The invention provides a polycrystalline silicon rod having a total diameter of at least 150 mm, comprising a core (A) having a porosity of 0 to less than 0.01 around a thin rod, and at least two subsequent regions B and C which differ in porosity by a factor of 1.7 to 23, the outer region C being less porous than region B. |
申请公布号 |
CA2813276(A1) |
申请公布日期 |
2013.11.07 |
申请号 |
CA20132813276 |
申请日期 |
2013.04.18 |
申请人 |
WACKER CHEMIE AG |
发明人 |
WEBER, MARTIN;DORNBERGER, ERICH;KERSCHER, MICHAEL;KRAUS, HEINZ;PECH, REINER |
分类号 |
C30B29/06;C01B33/02;C01B33/035;C30B25/18;C30B29/66 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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