发明名称 POLYCRYSTALLINE SILICON ROD AND PROCESS FOR PRODUCTION THEREOF
摘要 The invention provides a polycrystalline silicon rod having a total diameter of at least 150 mm, comprising a core (A) having a porosity of 0 to less than 0.01 around a thin rod, and at least two subsequent regions B and C which differ in porosity by a factor of 1.7 to 23, the outer region C being less porous than region B.
申请公布号 CA2813276(A1) 申请公布日期 2013.11.07
申请号 CA20132813276 申请日期 2013.04.18
申请人 WACKER CHEMIE AG 发明人 WEBER, MARTIN;DORNBERGER, ERICH;KERSCHER, MICHAEL;KRAUS, HEINZ;PECH, REINER
分类号 C30B29/06;C01B33/02;C01B33/035;C30B25/18;C30B29/66 主分类号 C30B29/06
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