| 摘要 |
PROBLEM TO BE SOLVED: To provide an imaging device having a compact structure, capable of effectively recognizing the contour of various substrates including transparent substrates.SOLUTION: An imaging device includes: a substrate supporting sheet 21 which supports a sapphire substrate S; an imaging element 18; a first light source 12 having an opening 15 at the central part for passing light, from which light is emitted for irradiation of the periphery of the sapphire substrate S; a beam splitter 16; a second light source 11 from which light is emitted and reflected by the beam splitter 16 so as to pass through the opening 15 for irradiation of the central part of the sapphire substrate S; and an image forming lens 17 for introducing light reflected by the surface of the sapphire substrate S to the imaging element 18. |
