| 摘要 |
PURPOSE: A deposition apparatus capable of pattern making is provided to deposit a pattern desired by a user as a source is selectively sprayed. CONSTITUTION: A deposition apparatus capable of pattern making comprises a chamber part, a nozzle part(120), a shutter part, a supply part(140), a transfer part(150), an input part(160), and a control part(170). The nozzle part has an injection hole for spraying a source toward a substrate(20). The shutter part selectively opens and closes the injection hole of the nozzle part. The transfer part transfers the substrate or/and the nozzle part. The control part controls the shutter part or/and the transfer part. Therefore, the source is deposited in a predetermined pattern(30) on the substrate. [Reference numerals] (140) Supply unit; (160) Input unit; (170) Control unit |
