发明名称 SHEET STICKING SYSTEM AND SHEET STICKING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet sticking system capable of improving working efficiency.SOLUTION: A sheet sticking system 1 according an embodiment comprises: first sticking means (first sticking unit 2) for sticking a sheet 6 to a frame 5 having a penetration part 5b in which a stuck member (semiconductor wafer 7) is arranged; second sticking means (second sticking unit 4) for sticking the sheet 6 to the stuck member arranged in the penetration part 5b of the frame 5; and first transportation means (first transportation unit 3) for transporting the frame 5 to which the sheet 6 is stuck by the first sticking means to the second sticking means.
申请公布号 JP2013229515(A) 申请公布日期 2013.11.07
申请号 JP20120101766 申请日期 2012.04.26
申请人 NEC ENGINEERING LTD 发明人 TAGA YOICHIRO;NISHIWAKI KAZUMASA;SENDA MASAO
分类号 H01L21/677;H01L21/301;H01L21/304;H01L21/683 主分类号 H01L21/677
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