发明名称 |
SHEET STICKING SYSTEM AND SHEET STICKING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a sheet sticking system capable of improving working efficiency.SOLUTION: A sheet sticking system 1 according an embodiment comprises: first sticking means (first sticking unit 2) for sticking a sheet 6 to a frame 5 having a penetration part 5b in which a stuck member (semiconductor wafer 7) is arranged; second sticking means (second sticking unit 4) for sticking the sheet 6 to the stuck member arranged in the penetration part 5b of the frame 5; and first transportation means (first transportation unit 3) for transporting the frame 5 to which the sheet 6 is stuck by the first sticking means to the second sticking means. |
申请公布号 |
JP2013229515(A) |
申请公布日期 |
2013.11.07 |
申请号 |
JP20120101766 |
申请日期 |
2012.04.26 |
申请人 |
NEC ENGINEERING LTD |
发明人 |
TAGA YOICHIRO;NISHIWAKI KAZUMASA;SENDA MASAO |
分类号 |
H01L21/677;H01L21/301;H01L21/304;H01L21/683 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|