发明名称 X-RAY INSPECTION METHOD AND X-RAY INSPECTION DEVICE
摘要 [Problem] To provide an X-ray inspection method enabling non-destructive high-speed shape measurement of an item for inspection. [Solution] An X-ray inspection method provided with: a simulation image generation step in which multiple simulation images having different shape parameters for the item for inspection are generated; an X-ray imaging step in which an X-ray image of the item for inspection is imaged; and a shape inference step in which a shape parameter of a simulation image having an evaluation value that satisfies a specified condition, said evaluation value representing the similarity to the X-ray image, among the multiple simulation images is inferred as the shape of the item for inspection.
申请公布号 WO2013164971(A1) 申请公布日期 2013.11.07
申请号 WO2013JP62127 申请日期 2013.04.24
申请人 TOKYO ELECTRON LIMITED 发明人 UMEHARA, YASUTOSHI
分类号 G01B15/04 主分类号 G01B15/04
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