| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid ejection head, capable of accurately forming an inclined outlet.SOLUTION: A method of manufacturing a liquid ejection head having an inclined outlet includes the steps of: forming a negative photosensitive resin layer on a substrate; applying first exposure to the negative photosensitive resin layer on condition that an unexposed portion is formed so that cross sectional area of a face in parallel with a substrate face increases from a back face side toward a surface side; applying second exposure to the negative photosensitive resin layer on condition that an unexposed portion is formed so that the cross sectional area decreases from the back face toward the surface; and forming the outlet by carrying out development after the first exposure and the second exposure. In the method of manufacturing the liquid ejection head, each of faces on the surface side and the back face side has a portion in which the unexposed portion in the first exposure and the unexposed portion in the second exposure overlap with each other, and a portion in which the unexposed portion in the first exposure and the unexposed portion in the second exposure do not overlap with each other. |
