发明名称 METHOD FOR PRODUCING NITRIDE SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method for efficiently growing a nitride single crystal even under low-pressure conditions.SOLUTION: A method for producing a nitride single crystal comprises a step for controlling a pressure inside a reactor holding a seed crystal 6 having a hexagonal crystal structure, a nitrogen-containing solvent, a raw material 4, and a mineralizer containing fluorine atoms so that the pressure reaches 5-200 MPa and the solvent reaches a supercritical state and/or subcritical state, and growing a nitride single crystal on the surface of the seed crystal 6. It is preferable that the pressure in the reactor is adjusted to 10-200 MPa. Further, in the reactor, the temperature in a region 1 where the raw material 4 is dissolved, is set to be lower than the temperature in a region 2 where the nitride crystal is grown on the surface of the seed crystal 6.
申请公布号 JP2013227195(A) 申请公布日期 2013.11.07
申请号 JP20130053474 申请日期 2013.03.15
申请人 TOHOKU UNIV;JAPAN STEEL WORKS LTD:THE;MITSUBISHI CHEMICALS CORP 发明人 ISHIGURO TORU;BAO QUANXI;YOKOYAMA CHIAKI;TOMITA DAISUKE;CHICHIBU SHIGEHIDE;KAYANO RINZO;UEDA MUTSUO;SAITO MAKOTO;KAGAMITANI YUJI
分类号 C30B29/38;C30B7/10;H01L21/208 主分类号 C30B29/38
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