| 摘要 |
PURPOSE: A micro pattern processing equipment with a sliding structure device for a solid strutting is provided to process a micro-pattern of a high precision by attaching a simple device in an existing processing device without using a design change and without using a large expenses. CONSTITUTION: A micro pattern processing equipment comprises a sliding rail (20), and a slider (30). The sliding rail is extended along a longitudinal direction of a transferring direction of a byte transfer device (14) of a processing device, and is mounted on a body of the processing device. The slider is mounted on the byte transfer device of the processing device. In the sliding rail, a concave groove (23) is formed to a longitudinal direction. In the slider, a convex part (32) is formed to a longitudinal direction. The convex part of the slider is inserted in the concave groove of the sliding rail in order to slide, and prevents a shaking of the byte transfer device. |
