| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus in which image drift, or the like, occurring when mounting a sample on a stage can be suppressed effectively.SOLUTION: Based on a detection signal obtained by a charged particle beam apparatus, the travel of a measuring point is determined, and the temperature of a sample stage is controlled so that the travel becomes zero or reaches or goes below a predetermined value. More specifically, the temperature of a sample stage is controlled so that the movement is suppressed depending on the travel of the measuring point which moves as the time elapses. |
