| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus for performing a predetermined processing on a roll-to-roll type elongated thin-plate substrate to form a film on a substrate surface, wherein a base material is transported smoothly using a Nelson roller and damage to the base material and failure of the apparatus are prevented.SOLUTION: A film-forming apparatus 1 is provided with a film-forming material supply unit, a first roller 51, and a second roller 52. The film-forming material supply unit is disposed inside a chamber, and a predetermined film-forming processing is performed on a transported base material 2. The first roller 51 transmits the base material 2 supplied from the outside of the chamber to the film-forming material supply unit, and discharges the base material 2 to the outside of the chamber after the film-forming processing. The second roller 52 has the rotation axis inclined at a predetermined angle from the rotation axis of the first roller 51, and the base material 2 is wrapped a plurality of times between the first roller 51 and the second roller, and the base material 2 is arrayed in a plurality of rows at the predetermined spacing. Here, at least any one of the first roller 51 and the second roller 52 is divided into a plurality of freely rotating independent rollers 51a-51n. |
