LITHOGRAPHIC PRINTING PLATE PRECURSOR DEFECT CORRECTION METHOD, MANUFACTURING METHOD, AND DEFECT CORRECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a lithographic printing plate precursor defect correction method which allows acquisition of a precise lithographic printing plate precursor by suppressing etching and deposition of a correction film due to inspection after defect correction, a lithographic printing plate precursor manufacturing method using the same, and a lithographic printing plate precursor defect correction device for executing the methods.SOLUTION: The lithographic printing plate precursor defect correction method is provided which includes: a correction step of etching a defect part of a lithographic printing plate precursor by irradiating the defect part with a charged beam while supplying an assist gas or depositing a correction film on the defect part by irradiating the defect part with a charged beam while supplying a gas for deposition; a discharging step of discharging the assist gas or the gas for deposition; a deactivating step of deactivating the assist gas or the gas for deposition after the discharging step; and a correction confirmation step of confirming the corrected defect part by irradiating it with a charged beam after the deactivating step.