| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface grinder capable of damping vibration at an early stage, the vibration of a movable table that is caused with the acceleration and deceleration of the movable table.SOLUTION: A surface grinder 100 moves an X-axis table 2 using a table-moving mechanism 20 capable of adjusting a flow rate and flow direction of a hydraulic fluid. The surface grinder includes: a control device 9 for controlling the movement of the X-axis table 2 by using the position or the velocity of the X-axis table 2 as an object for control; and a main controller 9A for controlling the flow rate and flow direction of the hydraulic fluid according to a table position command or a table velocity command from the control device 9 and the acceleration of the X-axis table 2. |
