发明名称 PROCESSING DEVICE INCLUDING CLEANING MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a structure which allows static electricity to be promptly discharged through a grounding wire by using a conductive and flexible sheet cover member, causing the sheet cover member to open and close an opening through the effects of moving means, and grounding the moving means.SOLUTION: In a cleaning mechanism, a sheet cover member is disposed being bent from an upper surface of a housing so as to be arranged along a side wall of the housing through a roller and static electricity of the sheet cover member is grounded through the moving means. A processing device includes the cleaning mechanism.
申请公布号 JP2013229462(A) 申请公布日期 2013.11.07
申请号 JP20120100860 申请日期 2012.04.26
申请人 DISCO ABRASIVE SYST LTD 发明人 ESUMI KAZUYA;MATSUYAMA TOSHIFUMI
分类号 H01L21/301;B23Q11/08;H01L21/304 主分类号 H01L21/301
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