| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply circuit for testing a plurality of semiconductor devices having sufficient supply capacity which allows test cost to be reduced and stable tests to be conducted.SOLUTION: A sense power supply circuit, which is supplied with first external power VDD1 and second external power VDD2 having lower supply voltage than the first external power and supplies sense power to semiconductor devices by boosting the second external power supply voltage, includes voltage boosting means 10 for boosting the second external power supply voltage fed thereto and outputting the boosted voltage as sense power, and power supply switching means 40 which does not drive the voltage boosting means and outputs the first external power as sense power when conducting a semiconductor device test, and drives the voltage boosting means to allow the second external power voltage boosted thereby to be output as sense power otherwise. |
