| 摘要 |
PROBLEM TO BE SOLVED: To attain high transmittance by reducing loss due to a frame of a particle beam while avoiding the breaking of a foil film due to atmospheric pressure or pressure fluctuation, to thereby manufacture a transmission window excellent in airtightness and strength.SOLUTION: A particle beam transmission window 10 includes a foil film 12 transmitting a particle beam, and a frame 14 that is brought into close contact with the foil film 12 and in which a minute through-hole 14a is formed into a mesh shape. A manufacturing method of the particle beam transmission window 10 includes: a first step of coating a metal 14c at least on the surface of the foil film side of the frame 14; a second step of irradiating the coating surface and the joint surface of the foil film 12 with an inactive element, an ion beam 16 thereof, plasma or an electron beam for activation; and a third step of pressurizing the foil film 12 and the frame 14 at room temperature to join them. |
