LIGHT MODULATION WAVEGUIDE

摘要

PROBLEM TO BE SOLVED: To provide a light modulation waveguide which is capable of obtaining a desired modulation operation without impairing the electric field modulation due to a two-dimensional carrier gas.SOLUTION: A light modulation waveguide includes a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, and a nitride-based semiconductor light waveguide layer which are formed on a C face of a substrate. The nitride-based semiconductor light waveguide layer is formed so as to be sandwiched between the first nitride-based semiconductor layer and the second nitride-based semiconductor layer. An interface between the nitride-based semiconductor light waveguide layer and the first nitride-based semiconductor layer and an interface between the nitride-based semiconductor light waveguide layer and the second nitride-based semiconductor layer are an a face or an m face.