| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for manufacturing a resin product that excels in wear resistance, antifogging properties, and antifouling properties, and in which high adhesion is secured at a laminate interface of a top coat layer.SOLUTION: A first gas for deposition including a silicon compound gas is made to react in a reaction chamber 28 of a vacuum condition by a plasma CVD method to form a silicon compound layer on an undercoat layer 14 of a resin substrate surface, and then a second gas for deposition including a titanium compound gas and an oxygen gas is made to react in the reaction chamber 28 by a plasma CVD method to laminate and form a titanium oxide layer on a silicon compound layer. In addition, a reaction of the first gas for deposition by a plasma CVD method and a reaction of the second gas for deposition by a plasma CVD method are made at the same time from the start of the introduction of the second gas deposition in the reaction chamber 28 to a time when an amount in the reaction chamber 28 of the silicon compound gas becomes zero by gradually decreasing an introduction amount of the silicon compound gas in the reaction chamber 28. |
