| 摘要 |
PROBLEM TO BE SOLVED: To find out that characteristics of an electronic device to be manufactured are adversely affected by an atmosphere of a heat treatment apparatus used for manufacture of the electronic device and to reduce adverse influence. SOLUTION: An inner surface of the heat treatment apparatus is covered with an oxide passivation film, and has a center average roughness Ra of ≤1 μm. Such a heat treatment apparatus can reduce deterioration of thermosetting resin due to dissolution, dissociation etc., of thermosetting resin during a treatment for curing the thermosetting resin. COPYRIGHT: (C)2011,JPO&INPIT |
