| 摘要 |
[Subject] An object of the present invention is to provide a resonator readily achieving a high resonance frequency without extreme downsizing and allowing for a high Q factor. [Solving Means] A resonator includes: a substrate serving as a base; a first beam having opposite ends fixed to the substrate via fixed connection portions, and having a vibration receiving location for providing linear reciprocating motion in a direction perpendicular to the longitudinal direction thereof; and second beams, branching toward one side from a plurality of branching locations different from the vibration receiving location in the first beam, for generating torsional vibration in accordance with the linear reciprocating motion. The resonator further includes a plurality of third beam, extending from the plurality of branching locations to a side opposite to the plurality of second beams, for generating torsional vibration. |
