发明名称 PRODUCTION METHOD OF A TARGET WITH THERMAL PROJECTION
摘要 Process for producing a target by thermal spraying, especially by plasma spraying, said target comprising at least one compound chosen from refractory metals, resistive oxides and volatile oxides, characterized in that at least one fraction of said compound in the form of a powder composition of said compound is sprayed by thermal spraying, onto at least one surface portion of the target, in a controlled atmosphere and in that powerful cryogenic cooling jets directed onto the target during its construction are used.
申请公布号 EP2417280(B1) 申请公布日期 2013.11.06
申请号 EP20100723660 申请日期 2010.04.12
申请人 SAINT-GOBAIN COATING SOLUTIONS 发明人 BILLIERES, DOMINIQUE
分类号 B22F3/115;B22F7/08;C23C4/08;C23C4/10;C23C4/12;C23C14/34;H01J37/34;H01L31/0224 主分类号 B22F3/115
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