VISION INSPECTION MODULE AND DEVICE INSPECTION APPARATUS

摘要

A vision inspection module which includes at least one light source which radiates lights to the surface of an object to be inspected; and at least two image acquisition units which are successively arranged on the surface of the object to be inspected in a direction perpendicular to a moving direction of the object to be inspected; and which acquires images of the object which is irradiated with the lights radiated by the light sources.