| 摘要 |
In order to reduce a, remaining solution when hydrogen peroxide gas is produced to a minimum, disclosed is a hydrogen peroxide gas production device characterized by being provided with an atomization unit which atomizes hydrogen peroxide stored in a storage part by applying ultrasonic vibration to the hydrogen peroxide, a heater which is provided above the atomization unit and heats the hydrogen peroxide atomized by the atomization unit to gasify the hydrogen peroxide, a metallic internal cylinder part in which the heater is disposed in the inner space thereof and which guides upward the hydrogen peroxide that is atomized by the atomization unit and flows together with carrier gas, and an external cylinder part in which the internal cylinder part is disposed in the inner space thereof to configure a double tube and which forms, with the internal cylinder part, a gas flow path for the carrier gas that goes down toward the storage part therebetween, and characterized by being configured so that the carrier gas flowing through the gas flow path is brought into contact with the internal cylinder part heated by the heater and the heated carrier gas is introduced into the storage part. |
