发明名称 LIQUID PHASE LASER ABLATION METHOD AND DEVICE
摘要 The present invention provides a liquid phase laser ablation apparatus comprising: a vessel for storing liquid in which a component to be atomized is arranged; a laser oscillating device for oscillating a laser light irradiated to the component through the liquid; a reflecting mirror configured to freely change an angle of incidence of the laser light with respect to a surface of the liquid; a focusing lens for focusing the laser light oscillated from the laser oscillating device; a cover body for covering an upper surface of the vessel; and a laser light introduction port provided on the cover body or a side surface of the vessel above the surface of the liquid. Due to the above structure, the liquid would not adhere to the optical components constituting the apparatus, there is little contamination and damage to the optical components, the operation of the laser ablation can be continued in continuous and stable manner for a long period of time.
申请公布号 KR20130121939(A) 申请公布日期 2013.11.06
申请号 KR20137021510 申请日期 2012.02.13
申请人 NARA MACHINERY CO., LTD. 发明人 NAGARE SANSHIRO
分类号 B01J19/12;B23K26/12;B23K26/36 主分类号 B01J19/12
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