| 摘要 |
[Problem] To provide a pressure sensor element which is not greatly decreased in the resistance due to temperature increase. [Solution] A pressure sensor element which is provided with a piezoelectric element and a high-resistance material film. The piezoelectric element has an upper surface and a lower surface. The high-resistance material film at least partially covers the upper surface and/or the lower surface. The electrical resistance of the high-resistance material film is higher than the electrical resistance of the piezoelectric element. |
