发明名称 PHOTO-DETECTOR AND SPECTROSCOPE USING THE SAME
摘要 <p>A photodiode array, having a plurality of photodiodes 12 (n-type channel regions 121), and a light entrance portion 13, formed of an opening that is used to make light to be detected by photodiodes 12 enter, are provided in a substrate 10 of a photodetector 1A having an n-type substrate 101 and a p-type epitaxial layer 102. Furthermore, a carrier capturing portion 60, for capturing carriers generated at a substrate portion near the light entrance portion 13 and removes the captured carriers to the exterior via an electrode 61, is arranged from a layer portion of the epitaxial layer 102 that is positioned between the photodiode array 11 and the light entrance portion 13. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.</p>
申请公布号 EP1693656(B1) 申请公布日期 2013.11.06
申请号 EP20040819369 申请日期 2004.11.24
申请人 HAMAMATSU PHOTONICS K.K. 发明人 KAGEYAMA, MITSUAKI;SHIBAYAMA, KATSUMI;MIZUNO, SEIICHIRO;TEICHMANN, HELMUT;HILLER, DIETMAR;STARKER, ULRICH
分类号 G01J1/02;G01J3/36;G01J3/28;H01L27/14;H01L27/144;H01L31/10 主分类号 G01J1/02
代理机构 代理人
主权项
地址