发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide an active matrix array capable of being improved in productivity in a state wherein insulating characteristics of an insulating film formed by printing coating are excellently held, and a method of manufacturing the same. <P>SOLUTION: Insulating film ink is printed and applied onto a base layer 34. The insulating film 32 is formed by baking the insulating film ink and completing the baking before a solvent included in the printed and applied insulating film sufficiently vaporizes to obtain predetermined insulation characteristics. On the insulating film 32 formed on the base layer 34, a conductive film 31 having one or more opening parts 33 is formed. Consequently, the solvent left in the insulating film 32 can vaporize from the opening parts 33 provided to the conductive film 31, so insulation characteristics of the insulating film 32 covered with the conductive layer 31 can be made excellent. Further, the conductive film 31 can be formed on the insulating film 32 before the insulating film 32 sufficiently vaporizes, so the productivity can be improved. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP5333046(B2) 申请公布日期 2013.11.06
申请号 JP20090193219 申请日期 2009.08.24
申请人 发明人
分类号 H01L27/146;G09F9/30;H01L21/3205;H01L21/768;H01L23/522;H01L27/144;H01L31/09 主分类号 H01L27/146
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