| 摘要 |
A method of producing a composite image of a sample using a charged-particle microscope, the composite image comprising a plurality of sub-images that are stitched together along overlap zones, said method comprising the following steps:
- Mounting the sample on a sample holder;
- Using a particle-optical column to direct at least one input beam of particulate radiation onto the sample, thereby producing an interaction that causes a plurality of different types of output radiation to emanate from the sample;
- Detecting a first type of output radiation and using it to produce:
– A sub-image I 1A of a primary region R A of the sample;
– A sub-image I 1B of a secondary region R B of the sample,
whereby R B is adjacent to R A and overlaps partially therewith, and I 1B has an overlap zone Z 1 with I 1A ,
which method comprises the following steps:
- Detecting a second type of output radiation, different to said first type, and using it to produce:
– A sub-image I 2A of primary region R A ;
– A sub-image I 2B of secondary region R B ,
whereby I 2B has an overlap zone Z 2 with I 2A ;
- Using computer processing apparatus to:
– Elect one of the sub-image pairs (I 1A , I 1B ) and (I 2A , I 2B );
– For the sub-image pair thus elected, calculate the relative shift ” of its two sub-images that is required to bring them into mutual registration, and stitch the two sub-images together after effecting this shift ”;
– For the other of the sub-image pairs, stitch its two sub-images together on the basis of the same relative shift ”.
In an aspect of this method, said computer processing apparatus is used to:
- Examine correlation of I 1B to I 1A within zone Z 1 ;
- Examine correlation of I 2B to I 2A within zone Z 2 ;
- Use the outcome of these examinations in performing said election. |
