| 摘要 |
The present invention relates to a semiconductor manufacturing device providing a renew program from a main controller and renewing the control program of a unit controller by the renew program. The main controller has a version combination data indicating the combination of the version information of the renew program required from each unit controller, determines whether the combination of the version information of the renew program required from each unit controller is same as the version combination data or not, provides each renew program to each unit controller when the combination of the version information of the renew program required from each unit controller is same as the version combination. [Reference numerals] (111) Main controller;(121a) Unit controller A;(121b) Unit controller B;(121c) Unit controller C;(121x) Unit controller X;(131a) Unit A;(131b) Unit B;(131c) Unit C;(131x) Unit X |
