发明名称 MASTER OSCILLATOR-POWER AMPLIFIER DRIVE LASER WITH PRE-PULSE FOR EUV LIGHT SOURCE
摘要 A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ1 and λ2, with λ1≠λ2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ1; a main pulse seed laser generating a laser output having wavelength, λ2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.
申请公布号 KR20130121809(A) 申请公布日期 2013.11.06
申请号 KR20137000713 申请日期 2011.05.24
申请人 CYMER, LLC 发明人 HOU KAI CHUNG;SANDSTROM RICHARD L.;PARTLO WILLIAM N.;BROWN DANIEL J. W.;FOMENKOV IGOR V.
分类号 H01S3/00 主分类号 H01S3/00
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