发明名称 |
Top corner rounding of damascene wire for insulator crack suppression |
摘要 |
A structure and method for fabricating the structure that provides a metal wire having a first height at an upper surface. An insulating material surrounding said metal wire is etched to a second height below said first height of said upper surface. The metal wire from said upper surface, after etching said insulating material, is planarized to remove sufficient material from a lateral edge portion of said metal wire such that a height of said lateral edge portion is equivalent to said second height of said insulating material surrounding said metal wire.
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申请公布号 |
US8575022(B2) |
申请公布日期 |
2013.11.05 |
申请号 |
US201113304772 |
申请日期 |
2011.11.28 |
申请人 |
CHRISMAN GREGORY S.;COONEY, III EDWARD C.;GAMBINO JEFFREY P.;HE ZHONG-XIANG;MCDEVITT THOMAS L.;SHAH EVA A.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHRISMAN GREGORY S.;COONEY, III EDWARD C.;GAMBINO JEFFREY P.;HE ZHONG-XIANG;MCDEVITT THOMAS L.;SHAH EVA A. |
分类号 |
H01L21/4763;H01L21/44 |
主分类号 |
H01L21/4763 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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