| 摘要 |
The embodiment provides a grinder chuck which includes: a base chuck which includes a vacuum supply line and a through hole which is formed from the vacuum supply line to a surface thereof; a porous chuck which is arranged on the base chuck; and a porous chuck body which is arranged on the edge of the porous chuck and includes a plurality of vacuum holes. A gap is formed between the surface of the through hole of the base chuck and the vacuum hole of the porous chuck body. |
