发明名称 |
Method for producing a semiconductor component |
摘要 |
Presented is a method for producing an optoelectronic component. The method includes separating a semiconductor layer based on a III-V-compound semiconductor material from a substrate by irradiation with a laser beam having a plateau-like spatial beam profile, where individual regions of the semiconductor layer are irradiated successively. |
申请公布号 |
US8575003(B2) |
申请公布日期 |
2013.11.05 |
申请号 |
US20090583500 |
申请日期 |
2009.08.21 |
申请人 |
FEHRER MICHAEL;HAHN BERTHOLD;HAERLE VOLKER;KAISER STEPHAN;OTTE FRANK;PLOESSL ANDREAS;OSRAM OPTO SEMICONDUCTORS GMBH |
发明人 |
FEHRER MICHAEL;HAHN BERTHOLD;HAERLE VOLKER;KAISER STEPHAN;OTTE FRANK;PLOESSL ANDREAS |
分类号 |
B23K26/00;H01L21/26;B23K26/40;B23K101/40;C30B33/00;H01L21/20;H01L21/268;H01L21/762;H01L33/00;H01S5/323 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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