发明名称 |
CRUCIBLE FOR GROWING SINGLE CRYSTAL SILICON, METHOD OF MANUFACTURING THE SAME, AND METHOD OF PRODUCING SINGLE CRYSTAL SILICON |
摘要 |
The purpose of the present invention is to provide a crucible for growing single crystal silicon, which enables to manufacture single crystal silicon showing a high conversion efficiency compared to the conventional single crystal silicon by preventing introduction of impurities in lifting single crystal silicon in the Czochralski method (CZ method), a manufacturing method of the crucible for growing single crystal silicon, and a production method of single crystal silicon. In order to realize the purpose, the present invention provides a crucible for growing single crystal which is used in growing single crystal silicon according to the Czochralski method, a manufacturing method of the crucible; and a production method of single crystal silicon using the crucible for growing single crystal, wherein the crucible for growing single crystal silicon comprises a low temperature melting layer, which is formed on the surface of a main body of the crucible on the side in contact with the melting silicon and melts at a lower temperature than the sintering temperature of the main body of the crucible made of amorphous fire-proof materials; and a coating layer with the porosity of 50% or less and the layer thickness of 0.1 mm or more by coating slurry containing silicon nitride on the low temperature melting layer and sintering. |
申请公布号 |
KR20130121004(A) |
申请公布日期 |
2013.11.05 |
申请号 |
KR20130003121 |
申请日期 |
2013.01.10 |
申请人 |
KYODO FINE CERAMICS CO., LTD. |
发明人 |
ISOMURA KEIICHIRO;YAMAZAKI KANJI;SAITO TAKESHI |
分类号 |
C30B15/10;C03B20/00;C04B38/00;H01L21/02 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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