APPARATUS OF FORMING SILANE, METHOD OF FORMING SILANE AND METHOD OF MANUFACTURING SILICON STEEL SHEET USING THE SAME

摘要

Provided is an apparatus for forming silane according to the present invention. The apparatus includes a first electrode having a first hole, second electrode which has a second hole and faces the first electrode with an interval, at least one granular silicon which is interposed between the first electrode and the second electrode, and a power supply unit which connects to to the first electrode and the second electrode to generate plasma between the first electrode and the second electrode. The hydrogen gas can be flowed in through the first hole. The silane formed by reacting plasma with hydrogen and granular silicon through the second hole can be discharged.