ELECTROSTATIC CHUCK

摘要

An electrostatic chuck comprises a base having a first through hole penetrating through the base. An electrostatic chuck suction plate is bonded to the base. A suction electrode embedded in the electrostatic chuck suction plate generates electrostatic charge and electrostatically absorbs an object. A concave part aligned with the first through hole is formed inside of the electrostatic chuck suction plate and partially exposes the suction electrode to the outside. A deposition layer is formed between the electrostatic chuck suction plate and the base and covers the inner surface of the concave part. A tubular insulator is arranged in the concave part and includes a second through hole. A power terminal is arranged in the first and second through holes and includes a front end portion which electrically touches the suction electrode.